A MEMS Fishbone-Shaped Electrostatic Double-Ended Tuning Fork Resonator With Selectable Higher Modes
Abstract: In this paper, a microelectromechanical systems fishbone-shaped electrostatic double-ended tuning fork (DETF) resonator with selectable higher modes is presented. The resonator can realize ...
Abstract: A force sensor in the heart of an atomic force microscope (AFM) plays a key role in the AFM measurements. Quartz tuning fork (QTF) based force sensor is attracting huge attention due to its ...
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